XEI Scientific, Inc.
The EVACTRON® Anti-Contaminator and De-Contaminator Relayed to Evactron.com Oct 2007
RF Plasma Cleaning Systems for Electron Microscopes
and High Vacuum Systems
Stops Artifacts and Removes Hydrocarbons and Organics.
Welcome! This
is XEI Scientific's old URL and home page.
XEI
Scientific solves hydrocarbon contamination problems in Electron
Microscopes and other high vacuum systems by RF plasma cleaning (glow
discharge cleaning) with EVACTRON® plasma activated oxidation
using air as the oxygen source. The Evactron® anticontamination
system produces Oxygen radicals for a fast, chemically reactive, oil
and hydrocarbon removal process that is safe for most surfaces.
The
Causes: Oil
Backstreaming, oil built-in during manufacturing, poor vacuum
practice and dirty specimens
The
Solutions:
EVACTRON®
- RF
plasma
cleaning inside the SEM and other high vacuum chambers. The Evactron
process is better than traps or dry pumps because it actively removes
all hydrocarbons rather than trying to stop the source.
Mounted
on a chamber port the compact
Evactron anti-contaminator
uses a low power RF plasma to generate oxygen radicals from admitted
air. Hydrocarbons are oxidized in low vacuum to H2O, CO, and CO2
molecules that are carried by convection to the roughing pump and
exhausted from the chamber. The Evactron
system
safely cleans the chamber, stage, samples, and x-ray detector
windows regardless of the source of contamination.
The Results:
• Stops scan deposits - removes the veil of contamination
• Improves
high magnification, high resolution imaging
• Maximizes low energy X-ray sensitivity - removes oil on Xray windows
• Increases precision - proven to stop CD SEM metrology drift
• Cleans specimens in-situ on the stage and in the microscope.
Search
Engine Topics:
Anti-Contamination
Accessory for Electron Microscopes
About
XEI Scientific
XEI
was founded in 1991 to make and sell the anti-contamination systems
for the Electron Microscope community. Over 140 SEM-CLEAN Nitrogen
purge systems were installed around the world by XEI Scientific.
The EVACTRON Anticontaminator, an RF plasma activated cleaning
system, was introduced in 1999 to provide a faster and more complete
cleaning process.
®EVACTRON
is a registered trademark of Ronald Vane.
How
to contact us:
Vince
Carlino - Sales Manager
Ronald
Vane - President
1735
East Bayshore Rd.
The
"spamstop" helps protect our addresses from
automated Web spyder programs that gather e-mail address for bulk emailing.
Please press the link to
our new Home page at Evactron.com
Hydrocarbon and
Organic Contamination
Control in Vacuum Systems
Black square and
raster burn control
Stopping Oil Drip
from X-ray windows
Plasma Cleaning of
high vacuum systems, FIB and SEM
Glow Discharge Cleaning
Hydrocarbon
Removal in vacuum chambers
SEM
Anti-contaminator and SEM Anticontaminator
RF Plasma cleaning
and RF Plasma Ashing
Organic
Contamination control and removal
Cleaning Organics
with an anticontaminator
Anticontamination
system for SEM and FIBs
EDX and EDS window cleaning
415-566-5774
E-mail:
Remove ".spamstop" in the address below
sales.spamstop@Evactron.com
XEI
Scientific
Redwood
City, CA 94063
Phone
(650) 369-0133, (800) 500-0133.
FAX
650-363-1659
E-Mail: Remove
".spamstop"
in the address below